x10 benchtop series (R&D)

  • Systems are designed to have a flat zone of 10-12” for processing batches of up to 50 wafers.
  • x10 can be configured for 100, 150 or 200 mm wafers.
  • Standard process guarantees are available for a wide range of applications.
  • The x10 systems are benchtop entry level systems using the new T-CON temperature & gas flow control system with 10″ touchscreen
  • Systems can be stacked in a two high configuration.
  • For all Thermco furnaces there are a number of configurable options and enhancements available to meet specific customer requirements.