• Systems are designed to have a flat zone of 10-12” for processing batches of up to 50 wafers.

• x10 can be configured for 100, 150 or 200 mm wafers.

• Standard process guarantees are available for a wide range of applications.

• The x10 systems are benchtop entry level systems using the new T-CON temperature & gas flow control system with 10″ touchscreen

• Systems can be stacked in a two high configuration.

• For all Thermco furnaces there are a number of configurable options and enhancements available to meet specific customer requirements.