- Systems are designed to have a flat zone of 10-12” for processing batches of up to 50 wafers.
- x10 can be configured for 100, 150 or 200 mm wafers.
- Standard process guarantees are available for a wide range of applications.
- The x10 systems are benchtop entry level systems using the new T-CON temperature & gas flow control system with 10″ touchscreen
- Systems can be stacked in a two high configuration.
- For all Thermco furnaces there are a number of configurable options and enhancements available to meet specific customer requirements.