2000 mini series Furnace Systems (R&D/Production)

2000 series Floor Standing R&D and Small Production Systems

  • The 2000 series range of furnaces are designed for R&D or low volume production environments.
  • Systems are designed to have a flat zone of 10-12” for processing batches of up to 50 wafers.
  • 2000 series furnaces incorporate the advanced design features found in Thermco full production systems.
  • Systems can be configured for 100, 150 or 200 mm wafers & have up to 4 tubes per stack.
  • Standard process guarantees are available for a wide range of applications.
  • Systems are controlled by the industry leading TMX controller, with the PCMUX supervisor providing a full graphical user interface for set up, recipe writing and data collection and analysis.
  • For all Thermco furnaces there are a number of configurable options and enhancements available to meet specific customer requirements.