Thermco HTR Diffusion Systems

Thermco Systems manufactures and supports a wide range of diffusion furnace models from single tube bench mounting style to four tube production systems with full automation. The common factor for all our systems is the emphasis on quality, reliability and process capability. All our products have design options adapted to the specific technology requirements, whether it be LED, MEMS, PV, Nano or Semiconductor.

• 2000 mini series Furnace Systems (R&D/Production)
• 5000 series Furnace Systems (Production)
• 8000 series Furnace Systems (Production)
• Automated System options (Production)
• Customised Systems
• Legacy tools
• PCMUX Control System
  • Remote user option for PCMUX
  • SPC (Statistical Process Control)
• Thermco VTR 7000XE
• T-Clean wet chemical solutions
  • Porous Silicon Formation
  • Quartz tube cleaning systems
  • Semiconductor & Solar Wet Benches
  • Semiconductor Cleaning Systems
• x10 benchtop series (R&D)
• x60 compact series (R&D)