Thermco has built a library of photovoltaic processes based on design of experiment and process knowledge, including recipes for controlled junction depth, anti-reflective coating and passivation. Standard process include:
- N type doping with POCL3 for surface and groove
- P type doping with BBr3 for surface and groove
- P type doping with B2H6 for surface and groove
- Silicon Nitride for anti-reflective coating
- Wet oxidation surface passivation
- H2 anneal bulk passivation
