Solar

Thermco has built a library of photovoltaic processes based on design of experiment and process knowledge, including recipes for controlled junction depth, anti-reflective coating and passivation. Standard process include:

  • N type doping with POCL3 for surface and groove
  • P type doping with BBr3 for surface and groove
  • P type doping with  B2H6 for surface and groove
  • Silicon Nitride for anti-reflective coating
  • Wet oxidation surface passivation
  • H2 anneal bulk passivation