Carbon nanotube growth & Semiconductor processing

Thermco Systems – Experts in carbon nanotube growth systems and semiconductor processing equipment

Established in 1962 in Orange County, California, Thermco Systems have over 50 years of experience in the manufacture of leading edge diffusion furnaces and today, Thermco has the largest installed base of horizontal diffusion furnaces in the world.

From our UK headquarters in Sussex, we supply equipment to the traditional semiconductor market and have developed specialised product versions which have been embraced by companies in the MEMS, LED, photovoltaic and nano industries, including carbon nanotube growth systems.

Carbon nanotube growth systems

For nano technology, Thermco has characterised furnace applications such as carbon nanotube growth systems, DLC, Si Nano wires, graphenes and other related processes in both R&D and production systems. Standard or specialist pre-cursors can be used to allow for the growth of both doped and un-doped films, including:

  • SWCNT
  • MWCNT
  • DLC
  • Si Nano Wires
  • Graphenes

Semiconductor processing equipment

For the semiconductor industry, Thermco offer hardware via their semiconductor processing equipment and process solutions for all current semiconductor device technologies, including Bipolar, IGBT, MOS, Bi-CMOS, and MOSFET. For our semiconductor processing equipment, we have characterised all critical atmospheric and CVD processes for technologies down to 0.35 micron. These processes can also be used for non-critical (bulk processing) applications at advanced technology nodes. Standard processes include:

  • LPCVD Nitrate
  • LPCVD TEOS
  • LPCVD Polysilicon
  • In-Situ Doped Polysilicon (P and N type)
  • LPCVD BPSG
  • LPCVD VLTO
  • LPCVD HTO
  • Wet/Dry Oxide (with or without torch)
  • Pyrogenic Oxide with DCE, TCA, HCL
  • High Temperature Drive in
  • Forming Gas Anneal
  • Hydrogen Anneal
  • High Temp High Flow Anneal
  • Low Temp Cures or Anneals
  • POCL3 or BBr3 liquid dopant

In addition to carbon nanotube growth systems and semiconductor processing equipment, Thermco Systems also offer a full range of service support, installation and modification. We can offer retro-fits and upgrades to many furnaces products as well as supporting the large installed base of Thermco Systems’ furnaces. We can update gas systems, control systems and automation from the simplest R&D furnace to complex production tools.