Thermco has characterised furnace applications such as CNT, DLC, Si Nano wires, Graphenes and other related processes for Nano technology in R&D and production systems. Standard or specialist pre-cursors can be used to allow for the growth of both doped and un-doped films.



Drawing on 45+ years of semiconductor development, Thermco has hardware and process solutions for all current semiconductor device technologies, including Bipolar, IGBT, MOS, Bi-CMOS, and MOSFET. And as the company with the largest world-wide installed base of horizontal diffusion furnaces, users are able to call on unrivalled levels of technical and parts support.



MEMS device films have their particular challenges, requiring excellent electrical and/or optical quality, low mechanical stress and high levels of uniformity and step coverage within typically very thickly deposited or grown films. Using Thermco standard recipes, based on our years of experience, we can help you quickly and efficiently characterise your MEMS process.



The Photovoltaic industry is driven by throughput and process. Thermco has developed a class leading fully automated hardware solution designed to run fully characterised processes specific to the PV industry including POCL3, BBR3, BCL3, CVD Nitride, wet and dry oxide and H2 anneal for both mono and multi-Silicon.



LED manufacturing technology is one of the fastest growing areas in the electronic fabrication industry. Thermco has designed equipment dedicated to the specific needs of LED manufacturing including low temperature anneals, load and unload of substrates in a controlled N2 atmosphere and annealing in an ultra high vacuum environment.



Drawing on more than 30 years of expertise,  T-Clean is a supplier of cleaning and etching systems, focusing on the semiconductor and associated industries. T-Clean has expertise in all aspects of fluid handling, substrate automation and process solutions.


Thermco Systems, Leading Edge Diffusion Furnaces & Chemical Wet Benches

Thermco Systems designs and manufactures furnace systems, custom wet benches and chemical handling equipment for the semiconductor, MEMS, LED, photovoltaic and nanotechnology industries. The Thermco Innovation & Manufacturing Centre has its headquarters in the UK. Manufacturing to a high standard our quality products provide high uptime, fast throughput and excellent cost of ownership.

With decades of experience in providing customer solutions, Thermco Systems work with customers to understand their requirements and meet their needs whether it be for new systems, upgrades, retrofits, repairs, custom-made solutions or support services.